共 16 条
[1]
Arcus R. A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P124, DOI 10.1117/12.963634
[3]
GROELE RJ, 1988, THESIS CORNELL U ITH
[4]
Hanrahan M. J., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V771, P128, DOI 10.1117/12.940317
[5]
HINSBERG WD, 1983, 1983 PROC KOD MICR S
[6]
HUANG JP, 1989, ACS SYM SER, V412, P364
[8]
WATER INDUCED ACCELERATION OF THE DIFFUSION OF ORGANIC VAPORS IN POLMERS
[J].
JOURNAL OF POLYMER SCIENCE,
1954, 14 (76)
:321-327
[9]
LONG T, 1991, ADV RESIST TECHNOL 8, V1466, P188
[10]
METHYLATED POLY(4-HYDROXYSTYRENE) - A NEW RESIN FOR DEEP-ULTRAVIOLET RESIST APPLICATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1990, 8 (06)
:1466-1469