DISSOLUTION RATES OF COPOLYMERS BASED ON 4-HYDROXYSTYRENE AND STYRENE

被引:0
作者
LEI, CP
LONG, T
OBENDORF, SK
RODRIGUEZ, F
机构
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POLYMERS FOR MICROELECTRONICS: RESISTS AND DIELECTRICS | 1994年 / 537卷
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O6 [化学];
学科分类号
0703 ;
摘要
Copolymers were synthesized by free-radical polymerization using 4-acetoxystyrene and styrene in various ratios. These polymers then were hydrolyzed to the corresponding 4-hydroxystyrene (phenol) copolymers. The dissolution rates of the copolymers (using laser interferometry) decreased with a decrease in hydroxyl group content in aqueous developers (sodium hydroxide, potassium hydroxide, and a tetramethylammonium hydrolride based commercial developer). While an increase in pH value enhances the dissolution, an increase in cation size of these hydroxides at constant pH decreases the dissolution rate. The polymers become essentially insoluble in aqueous developers when the content of the monomer containing the hydroxyl group is less than 70 mole%. The dissolution rate of P(4HS/S) in organic solvents, methyl isobutyl ketone (MIBK), isopropyl alcohol (IPA), and their mixtures, increases as the styrene content increases. However,in IPA, dissolution rate goes through a maximum and then drops down with styrene content greater than 50 mole%. In mixtures of these two solvents, the polymer dissolves faster than it does in either pure solvent.
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页码:111 / 123
页数:13
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共 16 条
[1]  
Arcus R. A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P124, DOI 10.1117/12.963634
[2]   DISSOLUTION RATES OF POLY(METHYL METHACRYLATE) FILMS IN MIXED-SOLVENTS [J].
COOPER, WJ ;
KRASICKY, PD ;
RODRIGUEZ, F .
JOURNAL OF APPLIED POLYMER SCIENCE, 1986, 31 (01) :65-73
[3]  
GROELE RJ, 1988, THESIS CORNELL U ITH
[4]  
Hanrahan M. J., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V771, P128, DOI 10.1117/12.940317
[5]  
HINSBERG WD, 1983, 1983 PROC KOD MICR S
[6]  
HUANG JP, 1989, ACS SYM SER, V412, P364
[7]   A LASER INTERFEROMETER FOR MONITORING THIN-FILM PROCESSES - APPLICATION TO POLYMER DISSOLUTION [J].
KRASICKY, PD ;
GROELE, RJ ;
RODRIGUEZ, F .
CHEMICAL ENGINEERING COMMUNICATIONS, 1987, 54 (1-6) :279-299
[8]   WATER INDUCED ACCELERATION OF THE DIFFUSION OF ORGANIC VAPORS IN POLMERS [J].
LONG, FA ;
THOMPSON, LJ .
JOURNAL OF POLYMER SCIENCE, 1954, 14 (76) :321-327
[9]  
LONG T, 1991, ADV RESIST TECHNOL 8, V1466, P188
[10]   METHYLATED POLY(4-HYDROXYSTYRENE) - A NEW RESIN FOR DEEP-ULTRAVIOLET RESIST APPLICATION [J].
MCKEAN, DR ;
HINSBERG, WD ;
SAUER, TP ;
WILLSON, G ;
VICARI, R ;
GORDON, DJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :1466-1469