DIRECT EVIDENCE FOR 1NM PORES IN DRY THERMAL SIO2 FROM HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY

被引:79
作者
GIBSON, JM [1 ]
DONG, DW [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1149/1.2129579
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:2722 / 2728
页数:7
相关论文
共 34 条
[21]   HIGH-RESOLUTION ELECTRON-MICROSCOPY OF AMORPHOUS THIN-FILMS [J].
HOWIE, A .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1978, 31 (1-2) :41-55
[22]   EFFECTS OF TRACE AMOUNTS OF WATER ON THERMAL OXIDATION OF SILICON IN OXYGEN [J].
IRENE, EA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (12) :1613-1616
[23]   SILICON OXIDATION STUDIES - ANALYSIS OF SIO2 FILM GROWTH DATA [J].
IRENE, EA ;
VANDERMEULEN, YJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (09) :1380-1384
[25]   HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SI-SIO2 INTERFACE [J].
KRIVANEK, OL ;
SHENG, TT ;
TSUI, DC .
APPLIED PHYSICS LETTERS, 1978, 32 (07) :437-439
[26]  
LENZ F, 1971, ELECTRON MICROS, P540
[27]   N-BEAM LATTICE IMAGES .5. USE OF CHARGE-DENSITY APPROXIMATION IN INTERPRETATION OF LATTICE IMAGES [J].
LYNCH, DF ;
MOODIE, AF ;
OKEEFE, MA .
ACTA CRYSTALLOGRAPHICA SECTION A, 1975, A 31 (MAY1) :300-&
[28]   ELECTROCHEMICAL CHARGING OF THERMAL SIO2 FILMS BY INJECTED ELECTRON CURRENTS [J].
NICOLLIA.EH ;
BERGLUND, CN ;
SCHMIDT, PF ;
ANDREWS, JM .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) :5654-&
[29]  
RHULE MR, 1972, RAD INDUCED VOIDS ME, P255
[30]   THE THEORETICAL RESOLUTION LIMIT OF THE ELECTRON MICROSCOPE [J].
SCHERZER, O .
JOURNAL OF APPLIED PHYSICS, 1949, 20 (01) :20-29