ACCURATE PRESSURE MEASUREMENTS IN REGION 0.1-1000 MTORR - INTERCALIBRATION OF 2 MCLEOD GAUGES AND A CAPACITANCE MANOMETER

被引：28
作者：
BROMBERG, JP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.1492711
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：801 / &
相关论文
共 8 条
[1]   ABSOLUTE DIFFERENTIAL CROSS SECTIONS OF ELASTICALLY SCATTERED ELECTRONS .I. HE, N2, AND CO AT 500-EV [J].
BROMBERG, JP .
JOURNAL OF CHEMICAL PHYSICS, 1969, 50 (09) :3906-&
[2]   THEORETICAL AND EXPERIEMNTAL DETERMINATION OF AN ERROR IN PRESSURE INDICATION OF A MCLEOD MANOMETER [J].
DEVRIES, AE ;
ROL, PK .
VACUUM, 1965, 15 (03) :135-&
[3]  
ISHII H, 1961, 8 T VAC S 2 INT C, V1, P519
[4]   INELASTIC SCATTERING OF 390-V ELECTRONS BY HELIUM HYDROGEN METHANE ETHANE CYCLOHEXANE ETHYLENE + WATER [J].
LASSETTRE, EN ;
FRANCIS, SA .
JOURNAL OF CHEMICAL PHYSICS, 1964, 40 (05) :1208-&
[5]  
MEINKE C, 1963, VAKUUMTECHNIK, V12, P79
[6]  
NOTTINGHAM WB, 1961, 7 T NAT VAC S, P117
[7]   AVOIDING ERRONEOUS SUBMICRON PRESSURE READINGS - REFRIGERATED MCLEOD [J].
ROTHE, EW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1964, 1 (02) :66-&
[8]   RELIABLE SUBMICRON PRESSURE READINGS WITH CAPACITANCE MANOMETER [J].
UTTERBACK, NG ;
GRIFFITH, T .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) :866-+
1