MATRIX CALCULATION OF PRESSURES IN HIGH-VACUUM SYSTEMS

被引：7

|

作者：

HIRANO, H

KONDO, Y

YOSHIMURA, N

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575614

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：2865 / 2869

页数：5

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