GRAIN-SIZE DEPENDENCE IN A SELF-IMPLANTED SILICON LAYER ON LASER IRRADIATION ENERGY DENSITY

被引：36

作者：

TSENG, WF ^{[1
]}

MAYER, JW ^{[1
]}

CAMPISANO, SU ^{[1
]}

FOTI, G ^{[1
]}

RIMINI, E ^{[1
]}

机构：

[1] UNIV CATANIA,IST STRUTTURA MAT,I-95129 CATANIA,ITALY

来源：

关键词：

D O I：

10.1063/1.89938

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：824 / 826

页数：3

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