A METHOD OF EVAPORATING THIN FILMS UNDER 100 A

被引：1

作者：

HSIEH, EJ

BROWN, D

机构：

[1] Lawrence Radiation Lab., University of California, Livermore, Calif.

来源：

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS | 1968年 / 56卷 / 07期

关键词：

D O I：

10.1109/PROC.1968.6547

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new method is described for depositing thin films with prescribed thicknesses of 100 A or less. The method is based on the use of a geometrical scale factor and is an extension of the conventional weighing method. Copyright © 1968 by The Institute of Electrical and Electronics Engineers, Inc.

引用

页码：1243 / &