FACTORS DETERMINING THE COMPOUND PHASES FORMED BY OXYGEN OR NITROGEN IMPLANTATION IN METALS

被引：59
作者：
KELLY, R
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期
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D O I：
10.1116/1.571825
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：778 / 789
页数：12
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