FACTORS DETERMINING THE COMPOUND PHASES FORMED BY OXYGEN OR NITROGEN IMPLANTATION IN METALS

被引:59
作者
KELLY, R
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期
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D O I
10.1116/1.571825
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O59 [应用物理学];
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页码:778 / 789
页数:12
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