ON APPROXIMATE SOLUTIONS TO SOME NONLINEAR DIFFUSION-PROBLEMS

被引：12

作者：

OKRASINSKI, W ^{[1
]}

机构：

[1] UNIV WROCLAW,INST MATH,PL-50384 WROCLAW,POLAND

来源：

ZEITSCHRIFT FUR ANGEWANDTE MATHEMATIK UND PHYSIK | 1993年 / 44卷 / 04期

关键词：

D O I：

10.1007/BF00948485

中图分类号：

O29 [应用数学];

学科分类号：

070104 ;

摘要：

In the paper an approximate solution to a nonlinear diffusion problem in semiconductor production is considered. Some integral operator methods are used to estimate an error between this approximate solution and the exact one.

引用

页码：722 / 731

页数：10

共 12 条

[1] APPROXIMATE SOLUTIONS OF SOME NON-LINEAR DIFFUSION EQUATIONS [J].

ANDERSON, D ;

LISAK, M .

PHYSICAL REVIEW A, 1980, 22 (06) :2761-2768

[2] BORON-DIFFUSION IN SILICON-CONCENTRATION AND ORIENTATION DEPENDENCE, BACKGROUND EFFECTS, AND PROFILE ESTIMATION [J].

FAIR, RB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (06) :800-805

[3]

Ghandhi S.K, 1995, VLSI FABRICATION PRI

[4]

GONCERZEWICZ J, 1989, PITMAN RES NOTES MAT, V208, P59

[5] HIGH-CONCENTRATION ARSENIC DIFFUSION IN CRYSTALLINE SILICON - AN ASYMPTOTIC ANALYSIS [J].

KING, JR .

IMA JOURNAL OF APPLIED MATHEMATICS, 1987, 38 (02) :87-95

[6] APPROXIMATE SOLUTIONS TO A NONLINEAR DIFFUSION EQUATION [J].

KING, JR .

JOURNAL OF ENGINEERING MATHEMATICS, 1988, 22 (01) :53-72

[7] ZN DIFFUSION IN GAAS UNDER CONSTANT AS PRESSURE [J].

LUQUE, A ;

MARTIN, J ;

ARAUJO, GL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (02) :249-254

[8] SIMPLIFIED EXPRESSION FOR DISTRIBUTION OF DIFFUSED IMPURITY [J].

NAKAJIMA, Y ;

OHKAWA, S ;

FUKUKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (01) :162-&

[9]

OKRASINSKI W, 1989, ANN POL MATH, V49, P237

[10]

Sze S. M., 1985, SEMICONDUCTOR DEVICE

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