IMPROVED SPUTTER-DEPTH PROFILES USING 2 ION GUNS

被引：43

作者：

SYKES, DE

HALL, DD

THURSTANS, RE

WALLS, JM

机构：

来源：

APPLIED SURFACE SCIENCE | 1980年 / 5卷 / 01期

关键词：

D O I：

10.1016/0378-5963(80)90122-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：103 / 106

页数：4

共 12 条

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