SINGLE-ELEMENT ROTATING-POLARIZER ELLIPSOMETER - PSI METER

被引:16
作者
ZAGHLOUL, ARM [1 ]
AZZAM, RMA [1 ]
机构
[1] UNIV NEW ORLEANS,SCH ENGN,DEPT ELECT ENGN,NEW ORLEANS,LA 70122
关键词
D O I
10.1016/0039-6028(80)90301-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:168 / 173
页数:6
相关论文
共 5 条
[1]   COMBINED REFLECTION AND TRANSMISSION THIN-FILM ELLIPSOMETRY - UNIFIED LINEAR ANALYSIS [J].
AZZAM, RMA ;
ELSHAZLYZAGHLOUL, M ;
BASHARA, NM .
APPLIED OPTICS, 1975, 14 (07) :1652-1663
[2]   ELLIPSOMETRIC FUNCTION OF A FILM-SUBSTRATE SYSTEM - APPLICATIONS TO DESIGN OF REFLECTION-TYPE OPTICAL DEVICES AND TO ELLIPSOMETRY [J].
AZZAM, RMA ;
ZAGHLOUL, ARM ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1975, 65 (03) :252-260
[3]  
Bilenko D. I., 1978, Optics and Spectroscopy, V45, P58
[5]   SINGLE-ELEMENT ROTATING-POLARIZER ELLIPSOMETER FOR FILM-SUBSTRATE SYSTEMS [J].
ZAGHLOUL, ARM ;
AZZAM, RMA .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (09) :1286-1287