STRUCTURAL AND OPTICAL-PROPERTIES OF AL0.48IN0.52AS LAYERS GROWN ON INP BY MOLECULAR-BEAM EPITAXY - INFLUENCE OF THE SUBSTRATE-TEMPERATURE AND OF A BUFFER LAYER

被引:50
作者
TOURNIE, E
ZHANG, YH
PULSFORD, NJ
PLOOG, K
机构
[1] Max-Planck-Institut für Festkörperforschung, D-7000 Stuttgart 80
关键词
D O I
10.1063/1.349730
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the crystalline and optical properties of Al(y)In1-yAs ternary alloys grown by molecular beam epitaxy on InP substrates. We obtain Al0.48In0.52As layers with both high structural quality and excellent optical performance by growing (i) at high substrate temperature (600-degrees-C), (ii) on a high-quality Ga(x)In1-xAs/Al(y)In1-yAs short-period superlattice buffer, (iii) or on a high-quality Ga(x)In1-xAs buffer layer, as attested by double-crystal x-ray diffraction and photoluminescence measurements. In addition the experimental results indicate a significant reduction of the clustering level in these samples which is interpreted in terms of a smoothing of the growth front, a thermodynamically controlled growth mode, and the interplay between In segregation and In desorption. Our investigations further show that the improvement of the structural quality and of the optical performance are strongly correlated. Finally, we report the first evidence of excitonic features in photoluminescence excitation spectra of the Al(y)In1-yAs ternary alloy.
引用
收藏
页码:7362 / 7369
页数:8
相关论文
共 53 条
[1]   INVESTIGATION OF SURFACE-ROUGHNESS OF MOLECULAR-BEAM EPITAXY GA1-XALXAS LAYERS AND ITS CONSEQUENCES ON GAAS/GA1-XALXAS HETEROSTRUCTURES [J].
ALEXANDRE, F ;
GOLDSTEIN, L ;
LEROUX, G ;
JONCOUR, MC ;
THIBIERGE, H ;
RAO, EVK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (04) :950-955
[2]   AUTO LATTICE MATCHING EFFECT FOR ALLNAS GROWN BY MBE AT HIGH SUBSTRATE-TEMPERATURE [J].
ALLOVON, M ;
PRIMOT, J ;
GAO, Y ;
QUILLEC, M .
JOURNAL OF ELECTRONIC MATERIALS, 1989, 18 (04) :505-510
[3]   DIRECT EXCITON SPECTRUM IN DIAMOND AND ZINC-BLENDE SEMICONDUCTORS [J].
BALDERES.A ;
LIPARI, NO .
PHYSICAL REVIEW LETTERS, 1970, 25 (06) :373-&
[4]   COMPARATIVE-STUDY OF THE GROWTH-PROCESSES OF GAAS, ALGAAS, INGAAS, AND INALAS LATTICE MATCHED AND NONLATTICE MATCHED SEMICONDUCTORS USING HIGH-ENERGY ELECTRON-DIFFRACTION [J].
BERGER, PR ;
BHATTACHARYA, PK ;
SINGH, J .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :2856-2860
[5]  
BRANDT O, UNPUB
[6]   GROWTH OF GAINAS BY CHEMICAL BEAM EPITAXY [J].
CARLIN, JF ;
RUDRA, A ;
HOUDRE, R ;
STAEHLI, JL ;
ILEGEMS, M .
JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) :1057-1059
[7]   SCHOTTKY-BARRIER HEIGHT OF INXAL1-XAS EPITAXIAL AND STRAINED LAYERS [J].
CHU, P ;
LIN, CL ;
WIEDER, HH .
APPLIED PHYSICS LETTERS, 1988, 53 (24) :2423-2425
[8]   THE EFFECT OF AS-4 OVERPRESSURE ON THE INCORPORATION OF IN INTO AL1-XINXAS GROWN ON (100) INP BY MOLECULAR-BEAM EPITAXY [J].
DAVIES, GJ ;
ANDREWS, DA .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (08) :L143-L146
[9]   THE EFFECT OF LATTICE MISMATCH ON THE DYNAMIC MICROSTRUCTURE OF III-V COMPOUND SURFACES [J].
EBNER, JT ;
ARTHUR, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2007-2010
[10]   SURFACE PROCESSES CONTROLLING GROWTH OF GAXIN1-XAS AND GAXIN1-XP ALLOY-FILMS BY MBE [J].
FOXON, CT ;
JOYCE, BA .
JOURNAL OF CRYSTAL GROWTH, 1978, 44 (01) :75-83