EFFECT OF CHLORINE ON NEGATIVE BIAS INSTABILITY IN MOS STRUCTURES

被引:9
作者
HESS, DW [1 ]
机构
[1] FAIRCHILD CAMERA & INSTR CORP,RES & DEV LAB,PALO ALTO,CA 94304
关键词
D O I
10.1149/1.2133397
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
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页码:740 / 743
页数:4
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