EXPERIMENTAL-METHOD FOR PREPARING NANOMETER-SCALE PD PROBE

被引：5

作者：

HUANG, L ^{[1
]}

LEE, YH ^{[1
]}

机构：

[1] DREXEL UNIV,DEPT CHEM ENGN,PHILADELPHIA,PA 19104

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 10期

关键词：

D O I：

10.1063/1.1144352

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Two-step electrochemical etching is used to fabricate a palladium microprobe having a tip diameter less than 20 nm. The first etching is done at 4-7 V in a solution containing 4:6 volume ratio of HCl:HNO3, while in the second the etching, low voltage pulses are used.

引用

页码：3022 / 3023

页数：2

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