INDIUM DOPED CADMIUM-SULFIDE FILMS DEPOSITED BY CYLINDRICAL MAGNETRON REACTIVE SPUTTERING

被引：3
|
作者：
THORNTON, JA [1 ]
CORNOG, DG [1 ]
ANDERSON, WW [1 ]
机构：
[1] LOCKHEED AIRCRAFT CORP,PALO ALTO RES LAB,PALO ALTO,CA 94304
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期
关键词：
D O I：
10.1116/1.570723
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：199 / 202
页数：4
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