DIAMOND CHEMICAL VAPOR-DEPOSITION

被引:140
作者
CELII, FG [1 ]
BUTLER, JE [1 ]
机构
[1] USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
关键词
OPTICAL DIAGNOSTICS; INSITU TECHNIQUES; GROWTH MODELING; GAS-PHASE KINETICS; NUCLEATION;
D O I
10.1146/annurev.pc.42.100191.003235
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
[No abstract available]
引用
收藏
页码:643 / 684
页数:42
相关论文
共 228 条
[21]  
BELTON DN, 1990, SURF SCI, V233, P133
[22]  
Benson, 1976, THERMOCHEMICAL KINET, V23, P613
[23]  
BRENNER DW, 1991, MAT RES S C, P39
[24]  
Bruton E, 1978, DIAMONDS
[25]   AN INVESTIGATION OF DIAMOND FILM DEPOSITION IN A PREMIXED OXYACETYLENE FLAME [J].
CAPPELLI, MA ;
PAUL, PH .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (05) :2596-2602
[26]   DETECTION OF GROUND-STATE ATOMIC-HYDROGEN IN A DC-PLASMA USING 3RD-HARMONIC GENERATION [J].
CELII, FG ;
THORSHEIM, HR ;
BUTLER, JE ;
PLANO, LS ;
PINNEO, JM .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :3814-3817
[27]   HYDROGEN-ATOM DETECTION IN THE FILAMENT-ASSISTED DIAMOND DEPOSITION ENVIRONMENT [J].
CELII, FG ;
BUTLER, JE .
APPLIED PHYSICS LETTERS, 1989, 54 (11) :1031-1033
[28]   INFRARED DETECTION OF GASEOUS SPECIES DURING THE FILAMENT-ASSISTED GROWTH OF DIAMOND [J].
CELII, FG ;
PEHRSSON, PE ;
WANG, HT ;
BUTLER, JE .
APPLIED PHYSICS LETTERS, 1988, 52 (24) :2043-2045
[29]   THE EFFECTS OF UV LASER IRRADIATION ON THE FILAMENT-ASSISTED DEPOSITION OF DIAMOND [J].
CELII, FG ;
NELSON, HH ;
PEHRSSON, PE .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2337-2344
[30]  
CELII FG, 1991, MAT RES S C, P631