DIAMOND CHEMICAL VAPOR-DEPOSITION

被引:140
作者
CELII, FG [1 ]
BUTLER, JE [1 ]
机构
[1] USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
关键词
OPTICAL DIAGNOSTICS; INSITU TECHNIQUES; GROWTH MODELING; GAS-PHASE KINETICS; NUCLEATION;
D O I
10.1146/annurev.pc.42.100191.003235
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
[No abstract available]
引用
收藏
页码:643 / 684
页数:42
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