MICROMACHINING OF OPTICAL STRUCTURES WITH FOCUSED ION-BEAMS

被引：27
作者：
HARRIOTT, LR
SCOTTI, RE
CUMMINGS, KD
AMBROSE, AF
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词：
D O I：
10.1116/1.583865
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：207 / 210
页数：4
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