Hot filament scaling-up for CVD diamond burr manufacturing

被引：18
|
作者：
TravaAiroldi, VJ
Corat, EJ
DelBosco, E
Leite, NF
机构：
[1] Laboratorio Associado de Sensores, Materais-Las Instituto Nacional de Pesquisas Espacias-INPE, 12201-970 Sao Jose dos Campos, SP
来源：
SURFACE & COATINGS TECHNOLOGY | 1995年 / 76-77卷 / 1-3期
基金：
巴西圣保罗研究基金会;
关键词：
CVD-diamond; dentist burr; hot filament; scaling-up; grain size;
D O I：
10.1016/0257-8972(95)02666-5
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We present the scale-up of a hot filament system for manufacturing CVD diamond burr. In our system, the diamond film growth rate reached around 15 mu m h(-1) on 1 mm diameter molybdenum rods. The burrs were made of 250 mu m thick free-standing diamond him. We optimized the gas consumption, power supply, gas flow rate and the number of hot filament reactors for the industrialization of dentist burr. We also discuss the production capabilities of each reactor. Scale-up and price prospective together with exhaustive testing show that CVD diamond burr may have a favorable cost-effectiveness.
引用
收藏
页码：797 / 802
页数：6
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