MONTE-CARLO SIMULATION OF SPECULAR AND SURFACE DIFFUSIONAL PERTURBATIONS TO FLOW FROM KNUDSEN CELLS

被引：27
作者：
WARD, JW
BIVINS, RL
FRASER, MV
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期
关键词：
D O I：
10.1116/1.1315797
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：206 / &
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