ELECTRICAL AND MAGNETIC-PROPERTIES OF THIN-FILMS CONTAINING METAL-CLUSTERS

被引：6

作者：

LAURENT, C ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS | 1989年 / 12卷 / 1-4期

关键词：

D O I：

10.1007/BF01426998

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

页码：465 / 467

页数：3

共 7 条

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[2] PLASMA POLYMERIZATION OF FLUOROCARBONS IN RF CAPACITIVELY COUPLED DIODE SYSTEM [J].

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[3] METAL-CLUSTERS IN PLASMA POLYMERIZED FLUOROCARBON FILMS - COBALT-ALUMINUM [J].

KAY, E ;

HECQ, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :401-404

[4] DEFINITION AND USE OF A SPECIFIC VALUE TO CHARACTERIZE THE DIELECTRIC-BREAKDOWN OF THIN INSULATING LAYERS [J].

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[5] DIELECTRIC-BREAKDOWN OF POLYMER-FILMS CONTAINING METAL-CLUSTERS [J].

LAURENT, C ;

KAY, E ;

SOUAG, N .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (01) :336-343

[6] OPTICAL-PROPERTIES AND MICROSTRUCTURE OF GOLD FLUOROCARBON-POLYMER COMPOSITE FILMS [J].

PERRIN, J ;

DESPAX, B ;

KAY, E .

PHYSICAL REVIEW B, 1985, 32 (02) :719-732

[7] MICROSTRUCTURE AND ELECTRICAL-CONDUCTIVITY OF PLASMA DEPOSITED GOLD FLUOROCARBON COMPOSITE FILMS [J].

PERRIN, J ;

DESPAX, B ;

HANCHETT, V ;

KAY, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (01) :46-51

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