DISTRIBUTION OF ONIUM SALT PHOTOINITIATORS IN A 2-PHASE EPOXY SYSTEM

被引:28
作者
COVERT, KL [1 ]
RUSSELL, DJ [1 ]
机构
[1] IBM CORP,DIV SYST TECHNOL,1701 N ST,ENDICOTT,NY 13760
关键词
Concentration distribution - Onium salt photoinitiators - Two phase epoxy system;
D O I
10.1002/app.1993.070490411
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
A phase-separated epoxy blend containing a sulfonium salt cationic photoinitiator was studied. The onium salt was found to be preferentially soluble in one of the resins of the system. Scanning electron microscopy and microprobe analyses were done to determine the concentration distribution in the phases and the results compared to a model based on liquid extraction distribution coefficient behavior. Finally, the photolithographic behavior of various blends of the epoxy resins is discussed and the results compared to the behavior predicted by the photoinitiator distribution.
引用
收藏
页码:657 / 671
页数:15
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