共 16 条
[1]
DESIGN CONSIDERATIONS FOR MICROMACHINED ELECTRIC ACTUATORS
[J].
SENSORS AND ACTUATORS,
1988, 14 (03)
:269-292
[2]
Chopra K.L., 1983, THIN FILM DEVICE APP
[3]
DOYLE WD, 1971, PHYS B, V22, P645
[8]
LENZ JE, 1988, UNPUB
[10]
FEATURES OF A MAGNETIC ROTARY ENCODER
[J].
IEEE TRANSACTIONS ON MAGNETICS,
1987, 23 (05)
:2182-2184