Pulsed laser deposition of Ca modified PbTiO3 thin films

被引：3
|
作者：
Mendiola, J
Martin, MJ
Ramos, P
Zaldo, C
机构：
[1] Instituto de Ciencia de Materiales de Madrid. C.S.I.C. Serrano 144.
来源：
MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(95)00147-6
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Ca-modified PbTiO3 thin films with thicknesses in the 200-1000 nm range were prepared by pulsed laser deposition on Pt/TiO2/SiO2/(100)Si substrates. An optimal crystalline orientation is obtained using non sintered targets, prepared with a 10% weight excess of PbO. The Ca concentration of the films remains close to its value in the target (24 mol %). These samples also exhibit the largest ferroelectric properties.
引用
收藏
页码：209 / 212
页数：4
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