共 50 条
- [3] Effect of CH4 concentration on the radicals of CH4/H2 plasmas in MP-CVD Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2013, 24 (05): : 946 - 950
- [5] CONCENTRATIONS OF CH4, H2, CO, N2O AND CO2 IN STRATOSPHERE TRANSACTIONS-AMERICAN GEOPHYSICAL UNION, 1974, 55 (04): : 384 - 384
- [8] Inductively coupled plasma etching of InP using CH4/H2 and CH4/H2/N2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (01): : 47 - 52