HYDRIDE SOURCES FOR DIFFUSION OF DOPANTS INTO SILICON-ON-SAPPHIRE FILMS

被引：3
|
作者：
DUMIN, DJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1969年 / 116卷 / 01期
关键词：
D O I：
10.1149/1.2411731
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：133 / +
页数：1
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