SOME PROPERTIES OF SILICON CARBIDE THIN FILMS PREPARED BY ELECTRON BEAM EVAPORATION

被引：5
|
作者：
BUNTON, GV
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1970年 / 3卷 / 02期
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D O I：
10.1088/0022-3727/3/2/421
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：232 / &
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