MICROFABRICATED AMPEROMETRIC GAS SENSORS

被引：36

作者：

MACLAY, GJ

BUTTNER, WJ

STETTER, JR

机构：

[1] ARGONNE NATL LAB,CTR ENVIRONM RES,DIV BIOL ENVIRONM & MED RES,ARGONNE,IL 60439

[2] TRANSDUCER RES INC,NAPERVILLE,IL 60540

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 06期

关键词：

Manuscript received September 24; 1987; revised January 12; 1988. This work was supported by the U.S. Army Chemical Research. Development; and Engineering Center. G. J. Maclay is with the Microelectronics Laboratory; Department of Electrical Engineering and Computer Science; University of Illinois; Chicago; IL 60680. W. J. Buttner is with the Biological; Environmental; and Medical Research Division; Center for Environmental Research; Argonne National Laboratory; Argonne; IL 60439. J. R. Stetter is with Transducer Research; Inc; Naperville. 1L 60540. IEEE Log Number 8820844;

D O I：

10.1109/16.2533

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：793 / 799

页数：7

共 16 条

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