PHOSPHORUS DIFFUSION IN PARTIALLY CRYSTALLIZED FILMS OF SIO2

被引：7
|
作者：
CAMPBELL, DR [1 ]
ALESSAND.EI [1 ]
TU, KN [1 ]
LEWIS, JE [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 08期
关键词：
D O I：
10.1149/1.2401981
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1081 / 1085
页数：5
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