LINEAR THERMAL-EXPANSION COEFFICIENT AND BIAXIAL ELASTIC-MODULUS OF DIAMOND-LIKE CARBON-FILMS

被引：28
|
作者：
BLECH, IA
WOOD, P
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 03期
关键词：
D O I：
10.1116/1.578800
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Diamondlike carbon films were deposited on silicon, gallium arsenide and aluminum substrates using ion-assisted chemical vapor deposition. The stress of these films was measured as a function of temperature between 25 and 150-degrees-C. Using the stress-temperature measurements, the average linear thermal expansion coefficient was found to be 2.3 ppm/degrees-C, while the biaxial elastic modulus 1.74 X 10(11) Pa.
引用
收藏
页码：728 / 729
页数：2
相关论文
共 50 条
  • [41] DIAMOND-LIKE CARBON-FILMS SYNTHESIZED BY CATHODIC ARC EVAPORATION
    COLL, BF
    SATHRUM, P
    AHARONOV, R
    TAMOR, MA
    THIN SOLID FILMS, 1992, 209 (02) : 165 - 173
  • [42] STUDY OF STRESS RELIEF PATTERNS IN DIAMOND-LIKE CARBON-FILMS
    IYER, SB
    HARSHAVARDHAN, KS
    KUMAR, V
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1990, (111): : 133 - 142
  • [43] LASER DEPOSITION OF DIAMOND-LIKE CARBON-FILMS AT HIGH INTENSITIES
    QIAN, F
    SINGH, RK
    DUTTA, SK
    PRONKO, PP
    APPLIED PHYSICS LETTERS, 1995, 67 (21) : 3120 - 3122
  • [44] THE PROPERTIES OF DIAMOND-LIKE CARBON-FILMS PREPARED BY RF DISCHARGES
    WHANG, KW
    TAE, HS
    THIN SOLID FILMS, 1991, 204 (01) : 49 - 58
  • [45] ION-BEAM DEPOSITION OF DIAMOND-LIKE CARBON-FILMS
    PUZIKOV, VM
    SEMENOV, AV
    SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3): : 445 - 454
  • [46] POSITRON-ANNIHILATION STUDY OF DIAMOND-LIKE CARBON-FILMS
    LOCKYER, R
    RICEEVANS, P
    SMITH, C
    PHILOSOPHICAL MAGAZINE LETTERS, 1993, 68 (03) : 167 - 171
  • [47] THERMAL-STABILITY OF PULSED-LASER DEPOSITED DIAMOND-LIKE CARBON-FILMS
    ONG, CW
    ZHAO, XA
    CHEUNG, JT
    LAM, SK
    LIU, Y
    CHOY, CL
    CHAN, PW
    THIN SOLID FILMS, 1995, 258 (1-2) : 34 - 39
  • [48] ENERGY-DEPENDENCE OF THE STRESS IN DIAMOND-LIKE CARBON-FILMS
    NIR, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 2954 - 2955
  • [49] GAP-STATE MEASUREMENTS ON DIAMOND-LIKE CARBON-FILMS
    MANDEL, T
    FRISCHHOLZ, M
    HELBIG, R
    HAMMERSCHMIDT, A
    APPLIED PHYSICS LETTERS, 1994, 64 (26) : 3637 - 3639
  • [50] DEPOSITION OF DIAMOND-LIKE CARBON-FILMS BY THE ANODIC ARC TECHNIQUE
    BUCK, V
    ORDE, JBA
    MAUSBACH, M
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 140 : 770 - 774
12345