LINEAR THERMAL-EXPANSION COEFFICIENT AND BIAXIAL ELASTIC-MODULUS OF DIAMOND-LIKE CARBON-FILMS

被引：28
|
作者：
BLECH, IA
WOOD, P
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 03期
关键词：
D O I：
10.1116/1.578800
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Diamondlike carbon films were deposited on silicon, gallium arsenide and aluminum substrates using ion-assisted chemical vapor deposition. The stress of these films was measured as a function of temperature between 25 and 150-degrees-C. Using the stress-temperature measurements, the average linear thermal expansion coefficient was found to be 2.3 ppm/degrees-C, while the biaxial elastic modulus 1.74 X 10(11) Pa.
引用
收藏
页码：728 / 729
页数：2
相关论文
共 50 条
  • [31] Using AFM to measure the elastic modulus of Diamond-Like Carbon thin films
    Alvarez, Robinson Franco
    Salvadori, Maria Cecilia Barbosa da Silveira
    DIAMOND AND RELATED MATERIALS, 2024, 145
  • [32] Measurement of elastic modulus and Poisson's ratio of diamond-like carbon films
    Cho, SJ
    Lee, KR
    Eun, KY
    Ko, DH
    MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 : 203 - 208
  • [33] HARDNESS AND YOUNG MODULUS OF DIAMOND-LIKE CARBON-FILMS PREPARED BY ION-BEAM METHODS
    DUNLOP, E
    HAUPT, J
    SCHMIDT, K
    GISSLER, W
    DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) : 644 - 649
  • [34] TRIBOLOGICAL BEHAVIOR OF DIAMOND AND DIAMOND-LIKE CARBON-FILMS - STATUS AND PROSPECTS
    BRAZA, JF
    SUDARSHAN, TS
    MATERIALS SCIENCE AND TECHNOLOGY, 1992, 8 (07) : 574 - 581
  • [35] ELASTIC-MODULUS, THERMAL-EXPANSION, AND SPECIFIC-HEAT AT A PHASE-TRANSITION
    TESTARDI, LR
    PHYSICAL REVIEW B, 1976, 13 (11): : 5095 - 5095
  • [36] ELASTIC-MODULUS, THERMAL-EXPANSION, AND SPECIFIC-HEAT AT A PHASE-TRANSITION
    TESTARDI, LR
    PHYSICAL REVIEW B, 1975, 12 (09): : 3849 - 3854
  • [37] PHOTOELECTRIC EFFECTS IN MQW STRUCTURES OF DIAMOND-LIKE CARBON-FILMS
    POLYAKOV, VI
    ERMAKOV, MG
    ERMAKOVA, ON
    PEROV, PI
    SLEPTSOV, VV
    ELINSON, VM
    BARANOV, AM
    DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) : 626 - 629
  • [38] DIAMOND-LIKE CARBON-FILMS PREPARED BY RF PLASMA DEPOSITION
    PAN, XD
    MAYDELL, EA
    MILNE, RH
    FABIAN, DJ
    VACUUM, 1990, 41 (4-6) : 1360 - 1363
  • [39] ELASTIC STIFFNESS AND THERMAL-EXPANSION COEFFICIENT OF BN FILMS
    RETAJCZYK, TF
    SINHA, AK
    APPLIED PHYSICS LETTERS, 1980, 36 (02) : 161 - 163
  • [40] THE IRRADIATION EFFECT OF MEV PROTONS ON DIAMOND-LIKE CARBON-FILMS
    WANG, TM
    WANG, WJ
    CHEN, BL
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 71 (02): : 186 - 190
12345