FABRICATION PROCESSES FOR A SILICON SUBSTRATE PACKAGE FOR INTEGRATED GALLIUM-ARSENIDE LASER ARRAYS

被引：5
|
作者：
BRADY, MJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 10期
关键词：
D O I：
10.1149/1.2131263
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1642 / 1647
页数：6
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