共 8 条
[1]
SUBMICROMETER-SCALE PATTERNING OF SUPERCONDUCTING NB FILMS USING FOCUSED ION-BEAM
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1992, 31 (4A)
:L410-L412
[2]
FUJIMAKI A, 1994, INT WORKSHOP HIGH TE, P206
[5]
SUBMICRON PATTERNING TECHNIQUE FOR YBA2CU3OY FILMS USING FOCUSED ION-BEAM LITHOGRAPHY
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1994, 33 (8A)
:L1124-L1127
[8]
MARTENS JS, 1989, 1989 P INT IEEE MTT, P443