ESCA APPLIED TO POLYMERS .28. PLASMA POLYMERIZATION .3. ESCA INVESTIGATION OF POLYMERS SYNTHESIZED BY EXCITATION OF INDUCTIVELY COUPLED RF PLASMAS IN PERFLUOROCYCLOHEXA-1,3-DIENES AND 1,4-DIENES, AND IN PERFLUOROCYCLOHEXENE

In the reported experiments, the plasma polymers prepared from perfluorocyclohexa-1,3-diene, perfluorocyclohexa-1,4-diene, and perfluorocyclohexene have been investigated by ESCA. The carbon-to-fluorine stoichiometries of the diene-derived polymers are similar and close to that of the starting material. The polymer prepared from perfluorocyclohexene is depleted in fluorine compared to the fluorine content of the ″monomer.″ The polymers prepared in nonglow regions are also studied and shown to be high in CF//2 derived species. The results are compared with those for perfluorobenzene and perfluorocyclohexane, and the polymerization rates are in the order C//6F//6 greater than C//6F//81,3 similar 1,4 greater than C//6F//1//0 similar C//6F//1//2. The variations in composition of the plasma polymer as revealed by ESCA as a function of the polymerization conditions are discussed.