STRUCTURAL-CHANGE INDUCED BY LASER ANNEALING IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：0

|

作者：

ZHONG, BQ

LU, ZQ

TANG, RY

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 112卷 / 1-3期

关键词：

D O I：

10.1016/0022-3093(89)90499-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：85 / 89

页数：5

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