STRUCTURAL-CHANGE INDUCED BY LASER ANNEALING IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：0
|
作者：
ZHONG, BQ
LU, ZQ
TANG, RY
机构：
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 112卷 / 1-3期
关键词：
D O I：
10.1016/0022-3093(89)90499-7
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：85 / 89
页数：5
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