STRUCTURE OF SILICON OXIDE FILMS

被引：66
作者：
COLEMAN, MV
THOMAS, DJD
机构：
来源：
PHYSICA STATUS SOLIDI | 1967年 / 22卷 / 02期
关键词：
D O I：
10.1002/pssb.19670220231
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
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页码：593 / &
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