TRANSPORT PROCESSES IN THERMAL GROWTH OF METAL AND SEMICONDUCTOR OXIDE FILMS

被引:18
作者
COLLINS, FC
NAKAYAMA, T
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D O I
10.1149/1.2426531
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:167 / +
页数:1
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