THE PREPARATION OF CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY SPECIMENS OF NB/AL MULTILAYER THIN-FILMS ON SAPPHIRE SUBSTRATES

被引：5
作者：
BARMAK, K
RUDMAN, DA
FONER, S
机构：
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
[2] MIT,FRANCIS BITTER NATL MAGNET LAB,CAMBRIDGE,MA 02139
[3] MIT,DEPT PHYS,CAMBRIDGE,MA 02139
来源：
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE | 1990年 / 16卷 / 03期
关键词：
Brittle ceramic substrates; Nb/al; Refractory materials; Thin films;
D O I：
10.1002/jemt.1060160306
中图分类号：
Q [生物科学];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
We have developed a technique for preparation of crosssectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and Nbcompounds and therefore makes it possible to obtain the electron transparent regions in the thin films rather than in the substrate. However, the brittle nature of the sapphire restricts the types of thinning techniques that can be used, requiring extensive ion thinning as a final stage. Copyright1990 WileyLiss, Inc.
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页码：249 / 253
页数：5
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