PLASMA NITRIDING OF TITANIUM PARTICLES IN A FLUIDIZED-BED REACTOR AT A REDUCED PRESSURE

被引：15

作者：

OKUBO, T

KAWAMURA, H

KUSAKABE, K

MOROOKA, S

机构：

[1] Department of Applied Chemistry, Faculty of Engineering, Kyushu University, Fukuoka

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1990年 / 73卷 / 05期

关键词：

fluidized bed; nitridation; particles; plasma; titanium nitride;

D O I：

10.1111/j.1151-2916.1990.tb05171.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A fluidized bed reactor operated at a reduced pressure is used to modify the surface property of particles. Titanium particles of 46‐ to 74‐μm diameter are fluidized by a nitrogen gas flow of 0.35 cm3‐std/s at a pressure of about 100 Pa, and a nitride layer is formed with the assistance of a radio‐frequency plasma discharge. Modified particles are characterized with elementary analysis and XPS. The nitriding rate is enhanced by the presence of the nitrogen plasma, and the kinetics obey a parabolic law. Copyright © 1990, Wiley Blackwell. All rights reserved

引用

页码：1150 / 1152

页数：3

共 10 条

[1] SURFACE MODIFICATION OF LOW-DENSITY POLYETHYLENE IN A FLUORINE-GAS PLASMA [J].