AN E-BEAM X-RAY SYSTEM FOR NANOLITHOGRAPHY

被引：0
|
作者：
BEAUMONT, SP [1 ]
SINGH, B [1 ]
WILKINSON, CDW [1 ]
机构：
[1] UNIV GLASGOW, DEPT ELECTR & ELECT ENGN, GLASGOW G12 8QQ, SCOTLAND
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 06期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C233 / C233
页数：1
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