MINIMUM DETECTABLE DIMENSION, RESOLVING POWER AND QUANTIFICATION OF SCANNING AUGER MICROSCOPY AT HIGH LATERAL RESOLUTION

被引：29
作者：
CAZAUX, J
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 6-7期
关键词：
D O I：
10.1002/sia.740140612
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：354 / 366
页数：13
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