MECHANICAL-STRESS AT (111) SI SURFACE COVERED BY SIO2 AND AL-SIO2 LAYERS

被引：18

作者：

JACOBS, EP

DORDA, G

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(78)90514-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：357 / 364

页数：8

共 11 条

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MULLER, RS ;

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