OPEN-CIRCUIT MODE DRIFT MOBILITY MEASUREMENTS IN DLC FILMS

被引:20
作者
MYCIELSKI, W
STARYGA, E
LIPINSKI, A
MITURA, S
SOKOLOWSKA, A
机构
[1] TECH UNIV LODZ,INST MAT SCI & ENGN,PL-90924 LODZ,POLAND
[2] TECH UNIV LODZ,INST MAT SCI & ENGN,PL-90924 LODZ,POLAND
关键词
D O I
10.1016/0925-9635(94)90285-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the paper the first results of the open-circuit mode time-of-flight experiment for diamond-like carbon films are presented. The electron drift mobility obtained is of the order of 10(-6) cm2 V-1 s-1 at room temperature. This suggests that hopping may be considered as the predominant transport mechanism for diamond-like carbon films prepared by r.f. glow discharge from methane.
引用
收藏
页码:858 / 860
页数:3
相关论文
共 32 条
[1]   DISCHARGE CHARACTERISTICS OF PHOTOCONDUCTING INSULATORS [J].
BATRA, IP ;
KANAZAWA, KK ;
SEKI, H .
JOURNAL OF APPLIED PHYSICS, 1970, 41 (08) :3416-&
[2]   CHARACTERIZATION OF CHEMICAL BONDING AND PHYSICAL CHARACTERISTICS OF DIAMOND-LIKE AMORPHOUS-CARBON AND DIAMOND FILMS [J].
BHUSHAN, B ;
KELLOCK, AJ ;
CHO, NH ;
AGER, JW .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (02) :404-410
[3]   ELECTRONIC-PROPERTIES OF SEMICONDUCTING DIAMOND-LIKE CARBON DIAMOND [J].
CHAN, KK ;
SILVA, SRP ;
AMARATUNGA, GAJ .
THIN SOLID FILMS, 1992, 212 (1-2) :232-239
[4]   DIAMOND ELECTRONIC DEVICES - CAN THEY OUTPERFORM SILICON OR GAAS [J].
COLLINS, AT .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 11 (1-4) :257-263
[5]   DIAMOND AND DIAMONDLIKE FILMS - DEPOSITION PROCESSES AND PROPERTIES [J].
DESHPANDEY, CV ;
BUNSHAH, RF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :2294-2302
[6]   XEROGRAPHIC DETERMINATION OF DRIFT MOBILITY IN A-SI-H [J].
ENCK, RC ;
ABKOWITZ, M .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) :255-260
[7]   THE ELECTRICAL-PROPERTIES AND DEVICE APPLICATIONS OF HOMOEPITAXIAL AND POLYCRYSTALLINE DIAMOND FILMS [J].
GILDENBLAT, GS ;
GROT, SA ;
BADZIAN, A .
PROCEEDINGS OF THE IEEE, 1991, 79 (05) :647-668
[8]   ELECTRON AND HOLE DRIFT MOBILITIES IN VITREOUS SELENIUM [J].
GRUNWALD, HP ;
BLAKNEY, RM .
PHYSICAL REVIEW, 1968, 165 (03) :1006-&
[9]   DRIFT MOBILITIES OF ELECTRONS AND HOLES AND SPACE-CHARGE-LIMITED CURRENTS IN AMORPHOUS SELENIUM FILMS [J].
HARTKE, JL .
PHYSICAL REVIEW, 1962, 125 (04) :1177-&
[10]   ELECTRICAL-PROPERTIES OF THIN CARBON-FILMS OBTAINED BY RF METHANE DECOMPOSITION ON AN RF-POWERED NEGATIVELY SELF-BIASED ELECTRODE [J].
HAS, Z ;
MITURA, S ;
CLAPA, M ;
SZMIDT, J .
THIN SOLID FILMS, 1986, 136 (02) :161-166