ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS DEPOSITED FROM FLUORODISILANES

被引：0

作者：

DERRICO, JJ ^{[1
]}

PERNISZ, UC ^{[1
]}

SHARP, KG ^{[1
]}

机构：

[1] DOW CORNING CORP,ELECTR RES,MIDLAND,MI 48686

来源：

SOLAR CELLS | 1989年 / 27卷 / 1-4期

关键词：

D O I：

10.1016/0379-6787(89)90048-3

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：391 / 401

页数：11

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