ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS DEPOSITED FROM FLUORODISILANES

被引:0
|
作者
DERRICO, JJ [1 ]
PERNISZ, UC [1 ]
SHARP, KG [1 ]
机构
[1] DOW CORNING CORP,ELECTR RES,MIDLAND,MI 48686
来源
SOLAR CELLS | 1989年 / 27卷 / 1-4期
关键词
D O I
10.1016/0379-6787(89)90048-3
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:391 / 401
页数:11
相关论文
共 50 条
  • [31] INFRARED OPTICAL-PROPERTIES OF AMORPHOUS-SILICON OXYNITRIDE AND THEIR THEORETICAL INTERPRETATION
    TESCHNER, U
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 121 (02): : 641 - 656
  • [32] OPTICAL-PROPERTIES AND STRUCTURE OF AMORPHOUS SILICON FILMS DEPOSITED BY CHEMICAL VAPOR-DEPOSITION
    JANAI, M
    BOOTH, DC
    SERAPHIN, BO
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 468 - 468
  • [33] INFLUENCE OF ARGON PARTIAL-PRESSURE ON THE ELECTRICAL AND OPTICAL-PROPERTIES OF SPUTTERED HYDROGENATED AMORPHOUS-SILICON
    SWANEPOEL, R
    SWART, PL
    AHARONI, H
    THIN SOLID FILMS, 1985, 128 (3-4) : 191 - 203
  • [34] CONTROL OF ELECTRICAL AND OPTICAL-PROPERTIES OF UNHYDROGENATED NEON-SPUTTERED AMORPHOUS-SILICON BY PREPARATION CONDITIONS
    ZAKA, Y
    ABONAMOUS, SA
    FANE, RW
    THIN SOLID FILMS, 1985, 125 (1-2) : 47 - 52
  • [35] EFFECT OF TEMPERATURE ON THE OPTICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS PREPARED BY VAPOR-PHASE DECOMPOSITION
    DIVRECHY, A
    YOUS, B
    BERGER, JM
    FERRATON, JP
    ROBIN, J
    DONNADIEU, A
    THIN SOLID FILMS, 1981, 78 (03) : 235 - 243
  • [36] DEPOSITION CONDITIONS RELATED TO THE CHEMICAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON THIN-FILMS
    PERRIN, J
    DREVILLON, B
    TOULEMONDE, M
    ANNALS OF THE NEW YORK ACADEMY OF SCIENCES, 1983, 410 (JUL) : 47 - 62
  • [37] EFFECTS OF RF POWER ON OPTICAL AND ELECTRICAL-PROPERTIES OF PLASMA-DEPOSITED HYDROGENATED AMORPHOUS-SILICON THIN-FILMS
    ANDUJAR, JL
    KASANEVA, J
    SERRA, J
    CANILLAS, A
    ROCH, C
    MORENZA, JL
    BERTRAN, E
    SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 : 733 - 736
  • [38] OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON BASED SOLAR-CELLS
    ELLIS, FB
    DELAHOY, AE
    SOLAR ENERGY MATERIALS, 1986, 13 (02): : 109 - 132
  • [39] STRUCTURAL, COMPOSITIONAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBON ALLOYS
    HERREMANS, H
    GREVENDONK, W
    VANSWAAIJ, RACMM
    VANSARK, WGJHM
    BERNTSEN, AJM
    BIK, WMA
    BEZEMER, J
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1992, 66 (06): : 787 - 800
  • [40] OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBIDE
    DUTTA, R
    BANERJEE, PK
    MITRA, SS
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1982, 113 (01): : 277 - 284