ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS-SILICON FILMS DEPOSITED FROM FLUORODISILANES

被引:0
|
作者
DERRICO, JJ [1 ]
PERNISZ, UC [1 ]
SHARP, KG [1 ]
机构
[1] DOW CORNING CORP,ELECTR RES,MIDLAND,MI 48686
来源
SOLAR CELLS | 1989年 / 27卷 / 1-4期
关键词
D O I
10.1016/0379-6787(89)90048-3
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:391 / 401
页数:11
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