OXIDATION OF SILICON IN AN OXYGEN GLOW DISCHARGE

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作者：
LERTES, K
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ZEITSCHRIFT FUR ANGEWANDTE PHYSIK | 1968年 / 24卷 / 03期
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O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
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页码：147 / &
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