GLOW-DISCHARGE PREPARATION OF HYDROGENATED AMORPHOUS-SILICON FROM DISILANE AND HIGHER SILANES

被引：0
|
作者：
SCOTT, BA [1 ]
BRODSKY, MH [1 ]
KIRBY, PB [1 ]
PLECENIK, RM [1 ]
GREEN, DC [1 ]
SIMONYI, EE [1 ]
KUCZA, J [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1980年 / 25卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：294 / 294
页数：1
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