THIN-FILM INTERACTION BETWEEN TITANIUM AND POLYCRYSTALLINE SILICON

被引：182
作者：
MURARKA, SP
FRASER, DB
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 01期
关键词：
D O I：
10.1063/1.327378
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：342 / 349
页数：8
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